a) Overall view of the CMOS-MEMS high-frequency resonator. (b
Por um escritor misterioso
Last updated 04 julho 2024
Integrated acoustic resonators in commercial fin field-effect
a) Perspective-view schematic of the capacitive-gap
Mechanically coupled CMOS-MEMS free-free beam resonator arrays
Micromachines, Free Full-Text
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AlN MEMS filters with extremely high bandwidth widening capability
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